JPH01176359U - - Google Patents
Info
- Publication number
- JPH01176359U JPH01176359U JP7232988U JP7232988U JPH01176359U JP H01176359 U JPH01176359 U JP H01176359U JP 7232988 U JP7232988 U JP 7232988U JP 7232988 U JP7232988 U JP 7232988U JP H01176359 U JPH01176359 U JP H01176359U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ion
- rear chamber
- clamp
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7232988U JPH0521244Y2 (en]) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7232988U JPH0521244Y2 (en]) | 1988-05-31 | 1988-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01176359U true JPH01176359U (en]) | 1989-12-15 |
| JPH0521244Y2 JPH0521244Y2 (en]) | 1993-05-31 |
Family
ID=31297501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7232988U Expired - Lifetime JPH0521244Y2 (en]) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521244Y2 (en]) |
-
1988
- 1988-05-31 JP JP7232988U patent/JPH0521244Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521244Y2 (en]) | 1993-05-31 |